JPH0422035U - - Google Patents

Info

Publication number
JPH0422035U
JPH0422035U JP6483990U JP6483990U JPH0422035U JP H0422035 U JPH0422035 U JP H0422035U JP 6483990 U JP6483990 U JP 6483990U JP 6483990 U JP6483990 U JP 6483990U JP H0422035 U JPH0422035 U JP H0422035U
Authority
JP
Japan
Prior art keywords
exhaust
slow
circuit
exhaust circuit
vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6483990U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6483990U priority Critical patent/JPH0422035U/ja
Publication of JPH0422035U publication Critical patent/JPH0422035U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Physical Vapour Deposition (AREA)
JP6483990U 1990-06-18 1990-06-18 Pending JPH0422035U (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6483990U JPH0422035U (en]) 1990-06-18 1990-06-18

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6483990U JPH0422035U (en]) 1990-06-18 1990-06-18

Publications (1)

Publication Number Publication Date
JPH0422035U true JPH0422035U (en]) 1992-02-24

Family

ID=31596137

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6483990U Pending JPH0422035U (en]) 1990-06-18 1990-06-18

Country Status (1)

Country Link
JP (1) JPH0422035U (en])

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